Professor Nathan Cheung

Prof. Nathan Cheung is Professor of Electrical Engineering and Computer Sciences at the University of California, Berkeley, specializing in microfabrication, electronic materials, ion implantation, plasma processing and integrated circuits.  He has been a part of the of UC- Berkeley’s faculty since 1980.

Prior to his professorship at UC Berkeley, Prof. Cheung held research positions at Exxon Research Laboratory in Linden, New Jersey and Bell Telephone Laboratories in Murray Hill, New Jersey. He was an Associate Faculty of Lawrence Berkeley Laboratory and was a Visiting Faculty at the National Research and Resource Facility for Submicron Structures at Cornell University in 1987. He served as Chair of the Applied Science and Technology Graduate Group at the University of California, Berkeley from 2002-2004, and Faculty Director of the Berkeley Microfabrication Laboratory from 2004-2006.
Prof. Cheung is also a respected professional outside the academic field. He co-founded Silicon Genesis Corporation,  the Plasma Doping Users Group (PDUG), and Silicon China (Hongkong) Limited.
 
Prof. Cheung received his BS degree in Physics from Massachusetts Institute of Technology in 1971, and his Ph.D. in Applied Physics from the California Institute of Technology in 1980.